Lithography tool is the central equipment which is used in
IC manufacturing process. A lithography tool is very expensive, modern state of
art EUV tool can cost up to 100 million. The “litho” tool is supposed to
operate 24*7 in order to meet the chip demand. As a litho tool is one of the
most important tool in chip manufacturing process, it also becomes a bottleneck
during its downtime. Therefore, it is very important that the tool is
available. SLA for tool availability are 98%.In order
to meet these availability SLA’s, ASML stocks service parts locally in local
warehouses which are located near customer locations. By keeping critical
service/spare parts close to customer location ASML reduces the risk of long or
extreme long downtime at the customers.  

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